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本スタンダードは，global Flat Panel Display – Materials & Components Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年2月にwww
it is necessary to standardize the classification of Mura for LCD
and the mutual positional relationship required to describe each position when AMHS loads and unloads the substrate to or from the manufacturing equipment
SEMI E5-1107 (technical revision)
3D01100 - SEMI 3D11 - Terminology for Through Glass Via and Blind Via in Glass Geometrical Metrology StdVol-Equipment Automation Software 本スタンダードは，global Flat Panel Display –1 Purpose 1. 1 The purpose of this Standard is to provide clear and commonly accepted definitions of through glass via (TGV) and to provide a consistent terminology for the understanding and discussion of metrology issues important them. 2 Scope 2. 1 This Standard attempts to describe measurands and geometrical features of through and blind vias in glass. 2. 2 The focus of this Standard is on geometry related metrology and measurands important for
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